Статьи
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Surface Photovoltage Method for Silicon-Sapphire Interface Monitoring
Keywords — surface photovoltage; SPV; silicon on sapphire; SOS; silicon-sapphire interface; interface monitoring; MOSFETАвтор: S. D. Fedotov, S. P. Timoshenkov, E. M. Sokolov, V. N. Statsenko, V. N. Stepchenkov
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Hydride-Chloride Epitaxy of High-Resistivity Si Layers on High-Doped Wafers
Keywords— silicon epitaxy; high-resistivity layer; high-doped wafer; arsenic segregation; resistivity profile; CVD; SRPАвтор: Evgeniy M. Sokolov, Vladimir N. Statsenko, Dmitry V. Tarasov, Sergey D. Fedotov
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Temperature Dependence of Silicon on Sapphire Quality
Keywords—epitaxial wafers; silicon on sapphire; silicon on insulator; SOS; SOI; growth temperature; epitaxial growth; initial layers growth; epitaxy; heteroepitaxy; CVDАвтор: S. D. Fedotov, S. P. Timoshenkov, D. I. Smirnov, E. M. Sokolov, V. N. Statsenko
