Our metrology capabilities are based on methods and equipment widely adopted by the Epi industry worldwide.
- Particle Control (KLA Tencor Surfscan 6220)
- 4 point probe measurement (RS30 Omni Map, ResMap178)
- Spreading resistance measurement (SSM130)
- Epi layer breakdown voltage measurement
- CV-measurement (SSM 495)
- Fourier spectral measurement (FS1201P)
- Wafer surface quality control (Reflex300, Reflex375)
- Microscopy («Jenatech», «Ergolux», «Latimet»)
To satisfy the growing requirements of the market to Epi wafer quality and parameter measurement accuracy Epiel regularly upgrades its metrology capability.